| 摘要 |
PURPOSE:To measure the size of a sample with high accuracy by measuring the size of the sample by a line image sensor while confirming visually an image formed on an area image sensor. CONSTITUTION:An operator moves a sample table 2 while viewing the whole shape of the sample 3 photodetected by the area image sensor 6 on a display device such as CRT so that a position to be measured on the sample 3 corresponds to the position of the line image sensor 7. When the sample 3 reaches a desired position, light projected on the sensor 7 is measured and then a control circuit operates, measures, and displays the size of the sample 3.
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