| 摘要 |
PURPOSE:To fit a metallic cover in the groove of a casing with a heat- conductive filler, to wind a heater wire, and to perform high-accuracy temperature control by putting a temperature detecting element in the metallic cover and forming the groove which has nearly the same surface shape with the fitting surface of the cover in the outer peripheral part of the casing. CONSTITUTION:The groove 12 is formed in the metallic casing 11 of a gas rate sensor, and the cover 13 where a thermistor 22 is stored is arranged in the groove and fixed with the heat-conductive filler 14. The abutting surfaces of the groove 12 and cover 13 are formed in the same shape, made large in contacting area, and made small in heat resistance to prevent the thermistor 22 from being heated in advance owing to the direct heat of the heater wire 15. Further, a heater wire 15 is wound around the cover 13 and temperature variation due to the On-Off operation of a heater 16 is detected more speedily to improve temperature rising characteristics and temperature adjustment accuracy. |
