发明名称 CONSTITUTION OF OPTICAL PROBE FOR MEASURING CONFIGURATION OF SIDE SURFACE
摘要 PURPOSE:To obtain the data of distance in the direction, which intersects with the axis of a tubular body, by arranging a light-beam generating means and an image forming optical system in the same tubular body. CONSTITUTION:A light-beam projecting means BP is composed of a light beam source S, a light-beam projecting lens LS and a light-beam projecting mirror MB. A light beam B is projected from the light-beam projecting means BP in the direction, which intersects with the light axis of an image sensing lens L. The light from a bright spot T(T') on the surface of an object body passes through the image sensing lens L. Thereafter, the light is reflected with mirrors M1 and M2. An image I(I') of the bright spot is formed on an image position detecting element P. Thus, the size of an optical probe device in the distance detecting direction can be made remarkably small. The optical probe, which can measure the configuration of the inner surface of a hole and the like can be implemented.
申请公布号 JPS63298104(A) 申请公布日期 1988.12.05
申请号 JP19870134197 申请日期 1987.05.29
申请人 RIKAGAKU KENKYUSHO 发明人 IDESAWA MASANORI
分类号 G01B11/24 主分类号 G01B11/24
代理机构 代理人
主权项
地址