| 摘要 |
PURPOSE:To shorten a processing time and to perform secure detection by ORing defect data of plural scans convolutionally and compressing the defect data, and deciding the continuity of the compressed defect data in the lengthwise and breadthwise directions and putting them together. CONSTITUTION:A defect detector 5 scans transparent liquid which flows in lengthwise with a light spot, and detects and outputs the kind, size, position, etc., of a defect to a defect data fetching circuit 20. When the defect data is fetched, an X-axial counter 11 outputs its counted value as X-coordinate position data and a Y-axial counter outputs its counted value as Y-coordinate position data. An OR unit 12 ORs the defect data of plural scans convolutionally and a continuity deciding circuit 21 compresses the defect data, decides the continuity of the compressed data in the lengthwise and breadthwise directions, and putting them into a defect data block, thereby outputting it as position information on the defect to an FIFO memory 15. Thus, the processing time is shortened and the secure defect detection is performed.
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