| 摘要 |
PURPOSE:To eliminate the adverse influence of remaining sodium by constituting the center part of a planar semiconductor material thin and superposing a semiconductor chip where a piezoelectric resistance element is formed, a glass- made pedestal, and a metal pedestal on one surface of the thin part. CONSTITUTION:The silicon chip 1, glass pedestal 2, and metal pedestal 4 are superposed one over another in a cylindrical insulating jig 5 while supported concentrically. Then the anode of a power source is brought into contact with the silicon chip 1 and metal pedestal 4 respectively and an anode connection is made at, for example, 300 deg.C and 1,500V. Sodium ions (Na<+>) are gathered nearby a conductive part 3. Oxygen ions (O<-->) are gathered on the surface connected to the silicon chip 1 and the surface brought into contact with metal pedestal 4. A sensing member 10 which is thus manufactured have the sodium ions gathering and remaining at the axial center part of the glass pedestals 2. Therefore, even if the sodium ions swell by moisture absorption, the connection part is not strained and the influence upon the silicon chip can be ignored.
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