DEVICE FOR PULLING UP SILICON SINGLE CRYSTAL

摘要

PURPOSE:To surely fix a heater and eliminate a breakage accident thereof, by partially engaging the heater with grooves provided in clamps with wedges and pressing the wedges with wedge pressing jigs thereon. CONSTITUTION:Two parts prepared by partially cutting the bottom of a heater 6 are engaged with grooves provided on the top surfaces of clamps 7 and 7 placed between electrode mounting parts of the heater 6 and fixed with wedges 16 and 16, which are then pressed thereon with wedge pressing jigs 17 and 17 mounted on the top surfaces of the clamps 7 and 7 with bolts 18 and 18.