| 摘要 |
PURPOSE:To prevent a voltage value of a generated high-voltage pulse from dropping by a method wherein a power conduction part is arranged within 65% of a size as measured from the center of a ceramic substrate. CONSTITUTION:Electrode films 2a, 2b are formed on both sides of a ferroelectric ceramic substrate 1. After that, power conduction parts 6a, 6b are formed in positions within 65% of a radius of the substrate 1 as measured from the center. The surface of the electrode films 2a, 2b excluding the conduction parts 6a, 6b is covered with ferroelectric crystallized glass films 3a, 3b. Then, conductive films 8a, 8b are formed on the surface of the glass films 3a, 3b in such a way that they cover the center of the surface and the conduction parts 6a, 6b leading to the electrode films 2a, 2b. Lastly, lead terminals 5a, 5b are bonded onto the conductive films 8a, 8b corresponding to the central part of the substrate 1. Because the power conduction parts 6a, 6b are arranged in positions within a region having no influence on a generated pulse voltage value in this manner, it is made possible to prevent a generated pulse voltage from dropping.
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