发明名称 APPARATUS FOR PREPARING LB FILM
摘要 PURPOSE:To prepare an LB film having a heterogeneous structure by a simple mechanism and a small-scale apparatus, by providing constitution not performing the delivery of a substrate as is conventional but transferring a monomolecular film. CONSTITUTION:A substrate up-and-down moving means 10 for moving a substrate 8 up and down at a constant position with respect to the surface of water and moving barriers 4a-4c traversing the constant position, where the substrate 8 is moved up and down, left and right to sweep the monomolecular films A, B developed on the surface of water are provided. A sliding member 14 is provided to the substrate up-and-down moving means 10 so as to be positioned outside the sweeping surfaces of the aforementioned moving barriers. The valve parts 16 brought into contact with the moving barriers in a slidable manner at the side ends of the sweeping surfaces of the aforementioned moving barriers are formed to the sliding member 14 at least at two upper and lower places and the support arm 18 for supporting the substrate 8 is formed between both valve parts. By this simple mechanism and small-scale apparatus, an LB film having a heterogeneous structure can be prepared.
申请公布号 JPS63296862(A) 申请公布日期 1988.12.02
申请号 JP19870136595 申请日期 1987.05.29
申请人 SHIMADZU CORP 发明人 UEDA YOSHITO
分类号 H01L21/368;B05C3/02;H01L51/05;H01L51/40 主分类号 H01L21/368
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