| 摘要 |
<p>This invention relates to a laser oscillator for oscillating a laser gas while circulating it with a rotating blower (6). A fresh gas passage (16) having a filter is disposed separately from a laser gas passage, and gas jet ports are disposed in the passage of the laser gas circulated through the fresh gas passage (16) by the blower (6), on the side of optical components (2, 3). The fresh gas passage (16) is connected to these jet ports (17a, 17b). Fresh laser gas from which impurities have been removed by the filters (9a, 9b) can flow from the jet ports (17a, 17b) in the direction opposite to the optical components (2, 3), and contamination of the optical components with the impurities due to diffusion from the laser gas can be prevented.</p> |
