| 摘要 |
PURPOSE:To make even such a heated material as large in heat dissipation uniformly heatable at high temperature by installing a recessed projection in the central part of a surface orthogonal with an electric field in the inner surface of heating chamber or a microwave cavity resonator in the parallel direction of the electric field. CONSTITUTION:A recessed metallic projection (conductive material) 4 is fixed to a heating chamber 3 or a microwave cavity resonator with sufficient contact so as to cause an electric field to be imposed in opposition to a heat treatment surface of a substrate 1. This projection 4 exists in a surface orthogonal with the electric field, whereby it may be installed in a surface being opposed to the substrate 1 or both sides. Here, if the projection is installed with a maximum field strength point of the surface orthogonal with an inner surface of the heating chamber 3 as the center, a uniform electric field is generable in the heating chamber 3. With this constitution, even in the case where heat dissipation is large such as high temperature heating of the substrate 1, a heated material can be heated at uniform temperature.
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