| 摘要 |
PURPOSE:To create a figure in high precision by performing three-axis control so that the rotary shaft of a tool is identical to the normal to the aspherical surface of a work, controlling the gap between the work and the tool, and performing processing while this gap is filled with the processing liquid. CONSTITUTION:Three-axis control is made with an X-axis linear location mechanism 4, a Z-axis liner location mechanism 15, and a theta-axis rotational location mechanism 16 so that the rotary shaft of a tool 14 is identical with the normal to the aspherical surface of a work 1. The gap between the work 1 and tool 14 is finely controlled by a control mechanism 17 on the basis of measurements given by a gap sensor 30, and processing is performed while the gap is filled with a processing liquid 33 with abrasive grains. This accomplishes contactless processing, and performing processing with the gap measured enables creation of high precision figure. |
