| 摘要 |
PURPOSE:To prevent generation of a defect by splashing by bringing a water absorptive elastic body into pressurized contact with the surface of a master disk after a preliminary process, developing process and stopping and washing processes. CONSTITUTION:The surface of the master disk 1 after the end of the washing process is wet with a washing liquid. The splashing of water drops and mists are generated when the master disk is rotated at a high speed to shake off the washing liquid in a drying stage. The water absorptive elastic body 5 is, thereupon, brought into tight contact with the surface of the disk 1 and the washing liquid on the surface of the disk 1 is absorbed by the water absorption effect of the elastic body 5 when the washing process ends. The elastic body 5 is further lowered to bring the elastic body 5 into pressurized contact with the surface of the disk 1 and to compress the elastic body 5 in order to attain the surer absorption. The elastic body 5 is this time risen from this state. Then, the elastic body 5 gradually restores to its original state and the absorption effect generated at the time of restoration forces the elastic body 5 to completely absorb the washing liquid on the disk 1 surface. The generation of the defect by the splashing is thereby prevented. |
