| 摘要 |
PURPOSE:To enable manufacturing superconductor thin films speedily, at low cost, and easily by supplying an oxygen deficiency compound metal oxide melted from the nozzle tip in the pot bottom to on a substrate rotating in the horizontal direction, and annealing a thin film of the compound metal oxide obtained in oxygen or air. CONSTITUTION:A compound metal oxide in the inside of a pot 1 is melted by a heating means 3 with an oxygen deficiency compound metal oxide put in the inside of the pot 1, the oxide is expressed by the formula Ba x M y Cu3O9-Z (in the formula, M are at least one or more than 1 kind of rare earth elements selected from the group of Y, Sc, La, Lu, yb, Tm, Er, Ho, Dy, Gd, and Sm, x is 1-3, y is 0.5-1.5, and z is 0-3). A substrate support body 5 horizontally rotates with a rotation axis 6, and a melted compound metal oxide 8 drippped from the nozzle 2 to the substrate 7 on the body 5 is made to be thin film with the oxide 8 extended by, centrifugal force. This enables a superconductor thin film having a perovskite type crystal structure to be easily manufactured by a relatively simple equipment.
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