| 摘要 |
PURPOSE:To make smooth the exhaust ion of grinding splash and prolong the life of a grinding wheel by providing an escape in the chamfering shape of a corner at the cutting tip of groove in connection with pocket-shaped groove formed in the grinding part. CONSTITUTION:Three rectangular grooves 5 are furnished at the open edge of grinding part at a constant angle spacing, and a triangular notch-shaped escape 7 is provided on the advance side in rotational direction of the cutting tip 6 of these grooves 5. Grinding splash 13 generated when the flat cutting tip 6 of the grinding part 2 forms a ring-shaped recess 12 in a Si wafer 9 is moved in the groove direction from the escape 7, and the grinding splash 13 stagnating in these grooves 5 is exhausted to outside. This hinders generation of clogs to enhance the trepanning accuracy and efficiency, to lead to prolongation of the life of grinding wheel.
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