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发明名称
POLYSILANVERBINDUNG UND DIESE ENTHALTENDE LICHTEMPFINDLICHE BESCHICHTUNGSMASSE
摘要
申请公布号
DE3817306(A1)
申请公布日期
1988.12.01
申请号
DE19883817306
申请日期
1988.05.20
申请人
KABUSHIKI KAISHA TOSHIBA, KAWASAKI, KANAGAWA, JP
发明人
HAYASE, SHUZI, KAWASAKI, JP;HORIGUCHI, RUMIKO;ONISHI, YASUNOBU;USHIROGOUCHI, TORU, YOKOHAMA, JP
分类号
G03C1/72;C08G77/00;C08G77/02;C08G77/48;C08G77/60;C08L83/16;G03C1/00;G03C1/675;G03F7/039;G03F7/075;G03F7/11;H01L21/027;H01L21/30;(IPC1-7):C08G77/60;G03F7/10
主分类号
G03C1/72
代理机构
代理人
主权项
地址
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