| 摘要 |
PURPOSE:To obtain the distribution of noticeable elements over a broad sample area by automatically moving a sample in a direction along an electron beam light axis at a fixed rate at every completion of the vertical scanning of the electron beam. CONSTITUTION:After the shutter of a camera 11 is opened, a scanning signal is generated from an X and Y scanning signal generator circuit 8x and the surface of a sample S on a first position (a) is scanned by means of an electron beam EB. Then, an x-ray among x-rays from the sample S passed through a slit SL and via a detector D displays a first sample image on the screen of a cathode-ray tube 10. After completion of 1 frame scanning, a control circuit 9 receives a signal from a circuit 8y and send it to a drive source 6 to operate a motor 5 at a fixed rate, while a sample stage 2 rises with the sample S at a fixed rate, then a second sample image is displayed on the screen while being scanned in the same manner as the first time. When the same operation and scanning are automatically carried out and the display covering all sample area required is finished, the shutter is closed automatically. The distribution of elements over a broad area can thus be attained. |
