Induction heating system for an epitaxial reactor.

摘要

Is described a reactor for chemical vapor deposition of epitaxial layers on crystal substrates, using a medium frequency induction heating system, the power for said heating being provided by a multi-turn coil (16), inducing electrical currents in a susceptor (12) of electrically conductive material, as graphite, said heating being controllable through fine local and readly automaticable current regulators in single turns (18) of said coil (16) and through properly shaping the walls (59) of said susceptor (12) in order to control temperature gradients therein.