Method of manufacturing fluidic angular rate sensor.
摘要
A method of manufacturing a fluidic angular rate sensor of the type that fine wires such as tungsten wires are tensely spread over the heads of two pairs of metal supports which are mounted on a ceramic disc having fluid passage apertures, includes the steps of: plating a gold on the wires and fixedly spreading the wires over the metal supports by means of thermocompression bonding or the like; and heating the wires in a predetermined atmosphere which allows the plated gold to be removed and the wires to be crystalized.
申请公布号
EP0292999(A2)
申请公布日期
1988.11.30
申请号
EP19880108523
申请日期
1988.05.27
申请人
HONDA MOTOR COMPANY LTD.;STANLEY ELECTRIC CO., LTD.