| 摘要 |
PURPOSE:To produce a multilayered magnetic film having intra-surface uniaxial magnetic anisotropy, low coercive force and high saturation magnetic flux density by forming multi-layered Fe/Co films which are alternately formed with Fe and Co films and in which the ratio of the thickness of the Co films to the thickness of the Fe films is specified in a 0.05-0.3 range. CONSTITUTION:The multi-layered films alternately laminated with Fe and Co are formed by using a film forming means such as sputtering method or vacuum deposition method. The multi-layered magnetic Fe/Co film material having the multi-layered film structure in which the film thickness ratio dCo/dFe of one layer of the film thicknesses dFe, dCo, of the Fe layers 12 and the Co layers 13 in the multi-layered films is specified to 0.05<=dCo/dFe<=0.3 and dFe<=20nm is thus obtd. The film structure in which the C-axis of the Co is preferentially oriented in the intra-surface direction of the substrate and the 110 face of the Fe is prefrentially oriented in the plane of the substrate is, therefore, obtd. The magnetic material having the high saturation magnetic flux density, the low coercive force and the intra-surface uniaxial magnetic anisotropy as well as the excellent soft magnetic characteristics is thereby obtd. |
