| 摘要 |
PURPOSE:To shorten a seal opening time by providing a chemical reservoir for temporarily storing chemical fed from chemical supply means, and injecting the chemical of the reservoir by a high pressure hydraulic pump to a specimen to be seal-opened to open it, thereby securing the constant quantity at all times of the chemical to be injected to heighten its injection pressure. CONSTITUTION:When the drive motor M1 of a gear pump 35 is driven, an operation section 35S thereof is operated to feed chemical, such as conc. sulfuric acid temporarily stored in a chemical reservoir 25 through pipes 52, 51 and a check valve CV into an inner cylindrical tube 43A. The chemical is injected through the tube 43A to open the seal of a specimen PM. Since the section 35S of the pump 35 is dipped in a heating tank 23, the temperature of the heated chemical fed to the section 35S is not reduced, but injected to seal opening units 33A, 33B. Accordingly, the chemical injection pressure by the pump 35 can be enhanced, and its reacting time can be shortened. This apparatus is used to melt to remove part of a semiconductor chip sealed with plastic to open the seal so as to check its quality.
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