| 摘要 |
PURPOSE:To make it unnecessary to suspend the operation of an apparatus during the supply of liquid thereto so as to improve the rate of operation, by providing an auxiliary liquid-material tank outside a constant-temperature tank and supplying a proper quantity of liquid to a tank provided in the constant- temperature tank in the case of fall of the liquid level in the constant- temperature tank from a set level therefor. CONSTITUTION:A partition plate 2 divides a constant-temperature tank 1 into an upper room 1a and a lower room 1b. In the lower room 1b a tank 3 for vaporizing liquid material is installed, to which a pipe 6 for supplying vaporized gas which is discharged to the outside is connected. On the other hand, an auxiliary liquid-material tank 10 is provided outside the constant-temperature tank 1, whereby liquid is supplied to the tank 3 through a liquid flow adjusting device 12. Fall of liquid level in the tank 3 from a high level is detected by a liquid level sensor 4 and thereby liquid is supplied from the auxiliary tank 10 to the tank 3 in the manner that the flow of the liquid is controlled at an optimum rate by means of the liquid flow adjusting device 12 so as not to give any temperature change to the tank 3, so that suspension of operation of the apparatus is not required at the supply of liquid.
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