| 摘要 |
PURPOSE:To form a resist pattern stably with high accuracy between mutual substrates or to the inside of the substrates by making a supporting plate 2 where the substrate is placed approach or brought into contact with a block for heating or cooling from the lower side, thereby heating or cooling it alternately. CONSTITUTION:The heat is conducted to a supporting plate 2 where a substrate is placed by making a heating plate 32 which is in advance heated by lifting operation with the aid of rotation of a screwshaft 34 approach as near the plate 2 for supporting substrate as possible or come into close contact with its plate so as to conduct the heat. A shutter 4 which is used to prevent radiant heat in order to protect the cooling block from the heat radiated by the heating block is mounted at a lower part of driving device 55. Thus, when the substrate is cooled, this device moves a cooling block horizontally up to a lower part of the supporting plate 2 by an horizontal moving driving device 56 and allows its cooling block 52 to approach as near a lower plane of the supporting plate 2 as possible or to come into close contact with its lower plane by lifting a cooling plate 52 mounted to a cooling plate fixing stand 53. |
