| 摘要 |
PURPOSE:To facilitate the measurement of pressure for impurities, which are the cause of a short life, and for an uncontrollable pressure medium, by providing two or more pressure sensitive elements, and providing ports, which introduce pressure medium from the side of a surface, on which circuits are not formed, for every pressure sensitive element. CONSTITUTION:For example, two pressure sensitive elements 1 and 2 are formed on one silicon substrate on a chip 3. The chip 3 is sealed and fixed to a cabinet 5 through a stage 4. Holes 6 and 7 are provided in the stage 4 in correspondence with the recess parts of diaphragms, which are provided for the pressure sensitive elements 1 and 2. Pressure-medium introducing ports 8 and 9 are provided in the cabinet 5. Meanwhile, power is supplied to the pressure sensitive elements 1 and 2 and output signals are taken out of the elements 1 and 2 through a wiring 10 and a lead 11. The side of the circuit surface of the chip 3 is packaged with a cap 12 with the inside being filled with a controlled atmosphere. In this constitution, special circuit protecting structure is not required. Expecially when the pressure difference is to be measured, freedom for applications is remarkably improved.
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