| 摘要 |
PURPOSE:To keep the electric field distribution between electrodes uniform, secure the incident space, prevent the distortion, and improve the incident efficiency by arranging the electrode plates in the charged particle passing region in parallel and with an inclination against the charged particle circling orbit plane. CONSTITUTION:In the charged particle passing region, an earth side electrode 11 and a high-voltage side electrode 12 are arranged in parallel, and they are arranged with an inclination of 45 deg. against the circling orbit plane of a circular accelerator. The electrodes 11, 12 in the passing region are located at the same distance, the electric field distribution is kept uniform, and the passing region of the charged particle beam at the time of two-dimensional incidence can be secured. Troubles such as an electric discharge between the electrodes 11, 12 are suppressed, and the distortion of the shape and divergence angle of the electron beam at the outlet of an incident unit can be made small. The incident efficiency of charged particles is thereby improved, and the one- dimensional incidence can be easily coped with if the incident position of charged particles is merely changed.
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