摘要 |
PURPOSE:To make it possible to easily obtain an excellent property by mixing and temporarily baking by a dry method using denatured oxide powder made by a wet method so as to make into material powder which has a composition same as the desired ceramic. CONSTITUTION:In the manufacture of dielectric resonator material of perovskite composition whose chemical formula is shown as Ba(Zn1/3Nbx/3Ta(1-x)/3)O3, 0<=x<=1, one of three kinds of solutions, i.e., a solution which contains Zn and a proper amount of metal component of at least one kind except Zn in the chemical formula, a solution which contains Ba and a proper amount of metal component of at least one kind except Ba, or a solution which contains Nb and a proper amount of metal component of at least one kind except Nb, is prepared. Next, a sol is generated by hydrolysis and the sol is baked temporarily after drying at 700-1300 deg.C into temporary baked substance and then this temporary baked substance and a compound of the remaining constituent components of the perovskite composition are mixed and baked temporarity at 700-1300 deg.C into temporary baked powder and this temporary baked powder is made into a form and baked again at 1200-1700 deg.C. Hereby BZNT material powder with diameter in the submicron range can be obtained easily. |