发明名称 |
AMORPHOUS SEMICONDUCTOR ALLOY USING ULTRASHORT WAVE ENERGY AND METHOD OF PRODUCING ELEMENT THEREOF |
摘要 |
A process for depositing semiconductor alloy films on a substrate by supplying microwave energy to a first gaseous mixture held at subatmospheric pressure in a reaction vessel to establish a glow discharge in the mixture, characterized in supplying microwave energy to a second gaseous mixture remote from the substrate to form free radicals, conveying the free radicals to the vicinity of the substrate and incorporating the free radicals in the film. |
申请公布号 |
JPS5978528(A) |
申请公布日期 |
1984.05.07 |
申请号 |
JP19830176099 |
申请日期 |
1983.09.22 |
申请人 |
ENERGY CONVERSION DEVICES INC |
发明人 |
SUTANFUOODO ROBAATO OBUSHINSUKII;DEIBUITSUDO DEIIN OORURETSUDO;RII UORUTAA;SUTEIIBUN JIENKINSU HADOJIENSU |
分类号 |
C23C16/30;C23C16/50;C23C16/511;H01J37/32;H01L21/205;H01L31/04 |
主分类号 |
C23C16/30 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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