| 摘要 |
PURPOSE:To obtain the titled dense sintered material having high thermal conductivity, providing a circuit substrate having excellent heat dissipation characteristics, by adding a sediment-forming agent to a mixed solution containing Al and one or more of rare earth metal and alkaline earth metal, drying the prepared coprecipitated substance, nitriding, blending the nitrided material with AlN powder, molding and burning. CONSTITUTION:A mixed solution of a solution containing a rare earth metal or an alkaline earth metal [e.g. aqueous solution of Y(NO3)3] obtained by dissolving nitrate, chloride, etc., of one or more of the rare earth metal and the alkaline earth metal in water or an alcohol and an Al-containing solution (e.g. aqueous solution of AlCl3) having Al corresponding to 2.6-6.0 times the total number of mol. of the metal is mixed with a sediment-forming solution such as NH3 water to give coprecipitated Y hydroxide and Al hydroxide. Then the coprecipitated Y hydroxide and Al hydroxide are separated, dried and nitrided in an N2 or NH3 atmosphere at 1,200-1,700 deg.C to give well dispersed compounded oxynitride (nitride) of submicron class, which is blended with AlN powder, molded and sintered in an N2-containing atmosphere at 1,500-2,100 deg.C. |
