| 摘要 |
PURPOSE:To make characteristics of a superconducting coil uniform by forming a uniform thin film layer consisting of an oxide superconductor at the outer circumference surface of a cylindrical or columnar substrate and then, by causing its layer to be patterned after removing a part of this thin film layer. CONSTITUTION:After performing a pretreatment at the outer circumference surface of a cylindrical substrate 1, a thin film layer 2 is formed by coating a superconductor. Then, a part of its layer 2 is removed and a superconducting coil is made by causing the thin film layer 2 to be patterned in the form of a ring. In such a case, the patterning treatment is carried out by a well-known photolithographic etching. In other words, a pattern 3 is formed with a dry or wet etching technique by using Si, metallic or the like as a mask. In this way, various materials are used as the substrate 1 and the pattern 3 consisting of a superconductor is easily formed on the substrate 1 according to the above materials and further, dimensions and the like of the pattern 3 can be formed with high accuracy. |
