| 摘要 |
PURPOSE:To obtain a highly reliable thin film temperature sensor which has superior resistance to humidity by using a pair of lead terminals which are linked together with a tie-bar by fixing upper parts of a pair of the lead parts to a temp. sensor chip and then, by coating the whole part of the lead terminals including the temp. sensor chip with a passivation film and, after cutting and separating the tie-bar, by coating the lead terminals with the passivation film so that its coating may eliminate lead terminals' exposed parts which are developed by cutting the tie-bar. CONSTITUTION:A pair of lead terminals 2 and 2 which are linked together with a tie-bar 1 are used. These lead terminals are fixed to a temperature sensor chip 3 in situations where a pair of the lead terminals 2 and 2 have been linked together with the tie-bar 1 and then, the surface of the temp. sensor chip 3 and upper parts of the tie-bar as well as the lead terminals 2 and 2 are coated with a passivation film 4. Then, after cutting the tie-bar, the lead terminals are coated with the passivation film 4' so that its coating may eliminate exposed parts of lead terminals which are developed by cutting the tie-bar.
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