Transfer machine in a surface inspection apparatus

摘要

A surface inspection apparatus is equipped with a transfer machine which includes a first storage unit for storing a plurality of wafers therein, a first transfer portion for receiving the wafers from the first storage unit one by one and transferring them along a horizontal plane, a first receiver moving vertically between a lower position and an upper position for receiving the wafers from the first transfer portion when the first receiver moves from its lower position to its upper position and moving them up and down, a chuck moving to a predetermined position under the wafers received by the first receiver when the first receiver is at or near its upper position and receiving the inspected elements from the first receiver when the first receiver moves from its upper position to its lower position, the chuck holding the wafers in their fixed condition and moving them in a given direction along a horizontal plane while they are inspected, a second receiver moving vertically between a lower position and an upper position for receiving the wafers from the chuck when the second receiver moves from its lower position to its upper position, a second transfer portion for receiving the wafers from the second receiver when the second receiver moves from its upper position to its lower position and transferring them along a horizontal plane, and a second storage unit for receiving the wafers from the second transfer portion and storing them therein.