| 摘要 |
PURPOSE:To improve the airtightness and the adhesion strength by a method wherein conductor constituents in a conductor paste are decided in such a way that one or more selected from copper and copper oxide are more than 77 wt.% with reference to copper and that remaining constituents are MnO2, Ag2O and one selected from TiO2 and TiH2. CONSTITUTION:Conductor constituents in a conductor paste are decided in such a way that one or more selected from copper and copper oxide are more than 77 wt.% with reference to copper and that remaining constituents are composed of less than 12 wt.% of MnO2, less than 8 wt.% of Ag2O and less than 3 wt.% of one or more selected from TiO2 and TiH2. Copper and copper oxide are heated, reduced and fired to form a conductor; MnO2 is reduced to form Mn2O3, MnO or Mn and enhances the wettability in relation to a ceramic, crystailized glass and copper inside a substrate. Ag2O is reduced to form Ag, forms a liquid phase of a silver solder Cu-Ag alloy locally at a boundary between copper particles and sinters the copper particles densely. Furthermore, TiO2 or TiH2 is diffused from a metallized part into the ceramic and enhances the adhesion strength. By this setup, the airtightness becomes excellent and the adhesion strength is improved. |
