METHOD FOR DEVELOPING SILICON MONOCRYSTALLIC MEMBRANES SRUCTURED IN THREE DIMENSIONS AS WELL AS SILICON MONOCRYSTALLIC MEMBRANE STRUCTURED IN THREE DIMENSION,申请号HU19870001882-传众专利搜索

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发明名称	METHOD FOR DEVELOPING SILICON MONOCRYSTALLIC MEMBRANES SRUCTURED IN THREE DIMENSIONS AS WELL AS SILICON MONOCRYSTALLIC MEMBRANE STRUCTURED IN THREE DIMENSION
摘要
申请公布号	HUT46795(A)	申请公布日期	1988.11.28
申请号	HU19870001882	申请日期	1987.04.28
申请人	MTA KOEZPONTI FIZIKAI KUTATO INTEZETE,HU	发明人	GYULAI,JOZSEF,HU;KADAR,GYOERGY,HU;TOTH,ANDRAS,HU
分类号	G01L1/18;H01L21/306;(IPC1-7):G01L1/18	主分类号	G01L1/18
代理机构		代理人
主权项
地址

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