| 摘要 |
PURPOSE:To eliminate the danger of the breaking of a lead wire and troublesome operation such as the adhesion of the lead wire by using the electrode of a bimorph element for driving as the signal line of a piezoelectric bimorph element for detection. CONSTITUTION:The electrode coupled electrically or mechanically with a coupling member 6 for the bimorph element 4 for driving is used as a ground electrode. Couples of signal lines 5a, 5b, and 5c which are equal in effective area provided on the surface facing the ground electrode. The signal lines 5a, 5b, and 5c are coupled electrically with the electrode of the piezoelectric bimorph element 1 for detection through a conductor 3 provided on the coupling member 2. The signal lines 5a, 5b, and 5c are coupled electrically with lead pins 9 through wires 8 respectively. |
