| 摘要 |
PURPOSE:To form thin films having uniform compsn. distributions and film thickness distributions on substrates by mounting the substrates on the faces of a polyhedral columnar body, rotating the columnar body and moving said body parallel at the time of forming thin films such as magnetic recording disk on a high polymer substrate. CONSTITUTION:A target 3 consisting of an Fe-Tb alloy, etc., and a hexagonal columnar rotating support 2 are disposed in a vacuum vessel 4 and the substrates 1 consisting of a high-polymer material such as polycarbonate are mounted to the side faces of the columnar body 2. After the inside of the vacuum vessel 4 is evacuated to a vacuum through a discharge port 5, gas such as Ar is introduced from a gas introducing port 6 into the chamber and is ionized by plasma to form the sputtered thin films of Fe-Tb alloy powder of the target 3 on the high-polymer substrates 1. Since the hexagonal support 2 is rotated around the axis thereof, the substrates 1 are cooled in the period when the substrates do not face the target 3. The substrates are, therefore, less damaged by heat. The support 2 is moved parallel with a loading chamber 31, a sputtering chamber 32 and an unloading chamber 33, by which the thin Fe-Tb films having the uniform thickness and compsn. are formed on the high-polymer substrates 1. |
