| 摘要 |
PURPOSE:To produce high density targets by preforming mixed powdery starting materials for a rare earth element-transition metal target material, vacuum- sealing the resulting preforms in a capsule and pressing them by hot isostatic pressing. CONSTITUTION:When rare earth element-transition metal targets having a compsn. consisting of 52.5% Tb, 44% Fe and 3.5% Co are produced, 88% Tb - 12% Fe alloy powder, pure Fe powder and pure Co powder classified to 32 mesh are weighed and mixed so as to provide the compsn. The mixture is filled into hot press molds are presintered under the conditions of >=350kg-f/cm<2> pressure and 10<-4>Torr degree of vacuum to obtain preforms 4. The preforms 4 are put in a mild steel can 1 in a piled state and alumina powder 5 as a pressure medium is filled between the preforms 4 and between the preforms 4 and the can 1. The preforms 4 are then sintered at high temp. and pressure in a hot isostatic press to produce rare earth element-transition metal targets having such high density as 100% relative density and free from adsorbed oxygen and inert gas. |
