| 摘要 |
<p>PURPOSE:To improve cleanness of conveyance in a conveyor device for wafers for integrated circuits by disposing superconductive matter and a magnetic field generating means facing each other, putting a subject matter on one of them, restraining both at a position where they face each other, and moving the other. CONSTITUTION:A conveyor belt 2 is composed of superconductive matter 22 and magnetic matter 23 disposed alternately on a belt 21, while a conveyor table 4 is composed of a table 41 and permanent magnets 42, 43. By this constitution, magnetic field from the permanent magnets 42, 43 is reflected at the superconductive material 22 by Meissner effect of the superconductive material 22, so the conveyor table 4 floats over the belt 2. It is also restrained at a certain position over the belt 2 by attraction force between the magnetic plate 23 and permanent magnets 42, 43. In this condition, if a roller 1 is driven so as to run the belt 2, the conveyor table 4 with a wafer 5 put on it follows the motion, floating over the belt 2, and it moves without contacting. By this constitution, cleanness can be improved.</p> |
