PRODUCTION OF WEAR-RESISTANT ELEMENT

摘要

PURPOSE:To form a thin film in two layers on a base body and to obtain a wear-resistant element which is large in wearing properties and extremely small in friction at low cost by introducing reactive gas into a vacuum tank and impressing microwave and a magnetic field to generate microwave plasma and allowing this to react with a gaseous raw material contg. carbon at two stages by a specified method. CONSTITUTION:At least one kind of reactive gas g1 is introduced (2) into a vacuum tank 1 and microwave plasma is generated by impressing microwave 4 and a magnetic field 7 and allowed to react with a gaseous raw material g2 contg. carbon and a first thin film consisting of a thin diamond film 11 or a thin diamond-like film 14 is deposited directly on a base body 5 or deposited on a base body 5' via a buffer layer 13. Then a lubricative film 12 or 12' is deposited on the first thin film by increasing the ratio of the gaseous raw materials g2 for the above-mentioned reactive gas g1 in comparison with the time for depositing the first thin film.