| 摘要 |
PURPOSE:To enable simultaneous regulation of the flow rates of two outlets, by a method wherein a valve body has tapered structure, a bypass flow is formed axially from the tip of a taper part, and a plurality of grooves having different outer sizes are formed in the outer peripheral surface thereof. CONSTITUTION:A flow rate control part 1 is formed with a gas flow rate control body 1a and a rodform plug 2. The body 1a has a gas inlet 12, two gas outlets 13 and 14 formed in juxtaposition, and a gas passage 1d. The gas passage part 1d is provided at a passage running between the gas outlets 13 and 14 with taper surfaces 1c and 1b in which a size is gradually increased from the gas outlet 14 side toward the interior. The plug 2 is provided at its tip part with a taper pert 10, forming a valve, and in its outer peripheral surface with a plurality of grooves 2a and 2b having different outer sizes, and is further provided with bypass passage 2c and openings 6 and 7. When the plug is situated in a position shown in Fig, gas flows out from the outlets 13 and 14. When the plug is lowered, the flow rate of the outlet 13 is decreased by means of an O-ring 3. When further lowered, the flow rate of the outlet is reduced to 0.
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