| 摘要 |
PURPOSE:To enhance humidity resistance and corrosion resistance by preventing the release of an insulating film from the surface of a beam body and protecting the beam body from the open air, by covering the whole beam body by the insulating film directly formed by applying and curing an insulating resin solution. CONSTITUTION:A beam body 1 is formed by applying machining to a metal material such as stainless steel, and a pair of circular holes 5 and the gap part 6 connecting both holes 5 are provided on the intermediate part of said beam body 1 so as to pierce the same in the lateral direction. The upper thin wall parts of the circular holes 5 are used as strain generating parts 7A, 7B. An insulating film 10 composed of a polymer material such as a polyimide resin is directly formed on the beam body 1 so as to cover the whole surface thereof. Strain gauge resistor patterns 11-14, a span controlling control pattern 15 and a terminal lead pattern 16 are respectively formed on the part, which covers the upper surface of the beam body 1, of the insulating film 10 by directly laminating a metal material to that part of the insulating film 10. These patterns 11-14, 15, 16 are formed by successively laminating metal layers A, B, C to the insulating film 10 laminated to the beam body by vapor deposition to apply photoetching to said layers A, B, C.
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