发明名称 FORMATION OF ZINC SELENIDE SINGLE CRYSTAL
摘要 PURPOSE:To form zinc selenide single crystal at temp. of a substrate keeping up low temp. of about 200 deg.C by making any one of the amount of the molecular beam of zinc and selenium constant and continuously increasing the other beam in the molecular beam epitaxial growth of zinc selenide single crystal. CONSTITUTION:Zinc selenide single crystal is formed on the substrate of a semiconductor by projecting the molecular beams of zinc and the molecular beams of selenium on the above-mentioned substrate. In this case, the temp. of the substrate is held at about 200 deg.C and any one of the amount of the molecular beam of zinc and the amount of the molecular beam of selenium is made constant and the other beam is continuously increased.
申请公布号 JPS63288999(A) 申请公布日期 1988.11.25
申请号 JP19870123564 申请日期 1987.05.20
申请人 SANYO ELECTRIC CO LTD 发明人 ISHII HIROAKI
分类号 H01L21/363;C30B23/08;C30B29/48;H01L21/203 主分类号 H01L21/363
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