| 摘要 |
PURPOSE:To supply an atmospheric gas having a large dilution at a respectively different rate of the dilution into a plurality of containers by adjusting a flow rate of a primarily diluted gas to a required volume by an overflow adjusting valve and joining and mixing with a secondary base gas supplying system in a back pressure reducing mixer. CONSTITUTION:On the occasion of a large dilution rate, stop valves S3 is shut, S1 and S2 are opened, and flow rate control valves are adjusted to prepare the primarily diluted gas. Subsequently, an excess of the primarily diluted gas is removed by the overflow adjusting valve V5 while the flow rates are adjusted by the flow rate adjusting valves V3 and V9. After that, the primarily diluted gas is mixed with the base gas in the back pressure reducing mixers M1 and Mn, and is supplied into the containers C1 and Cn at an appropriate flow rate. |
