| 摘要 |
PURPOSE:To prevent the clouding of the light introducing window of a vacuum vessel and to effectively carry out a light excited reaction by impressing voltage on an electrode placed in front of the window so as to form an electric field and to stick produced fine particles to the electrode and the inner wall of the vessel. CONSTITUTION:In a device for producing a thin film by a light excited reaction, excitation light 30 enters the vacuum vessel 1 through the light introducing window 3 and passes over a substrate 2 held on a support stand 4. At this time, gaseous starting material introduced into the vessel 1 is excited and deposits on the window 31, etc., as fine particles and radicals. In order to prevent the clouding of the window 31 and to increase the rate of deposition of a thin film, a clouding preventing electrode 32 insulated from the vessel 1 with an insulator 21 is placed on the inside of the window 31 and connected to a power source 33 and voltage is impressed on the electrode 32 to such a degree that glow discharge is not caused. An ununiform electric field is formed between the inner wall of the vessel 1 and the electrode 32, so fine particles, etc., produced by a light excited reaction can be stuck to the electrode 32 or the inner wall of the vessel 1 and captured.
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