| 摘要 |
PURPOSE:To lower the CI of the third harmonic wave overtone further by specifying the surface coarseness of the slope so as to prevent the leakage of energy due to the surface coarseness of the slope. CONSTITUTION:The slope 3 is formed in the X direction of the rectangular AT vibrator chip 1 whose external size is <=7mm in the direction X, <=2mm in the Z' direction, <=0.24mm and >=0.12mm in the direction Y' and the surface coarseness of the slope 3 is selected to be <=1.0mum. Thus, even when the size of the vibration chip is made small as <=7mm in the direction X and <=2mm in the direction Z', the CI of the third harmonic overtone is decreased by the energy confinement effect by forming the slope 3 in the X direction and since the surface coarseness of the slope 3 is selected to be 1.0mum or below, the leakage of energy due to the surface coarseness is not caused and the CI of the third harmonic wave overtone is lowered further.
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