| 摘要 |
<p>PURPOSE:To obtain a bonded quartz having improved temperature characteris tics and elastic characteristics and to simplify the constituent parts, by mirror polishing bonding faces of plural quartz single crystals, washing and drying the quartz, directly contacting all faces of the quartz in a clean atmosphere with each other and cooling the assembly after heating. CONSTITUTION:For example, in the production of a surface acoustic wave-type pressure sensor, the bonding face 101 of a sensor part 1 and the bonding face 301 of a body part 3 are mirror polished by lapping and chemical etching. Each bonding face is washed by immersing into a mixture of sulfuric acid and hydrogen peroxide at 100 deg.C for about 10min. The cleaned faces are washed with pure water, dried e.g. with a spinner and made to contact with each other aligning the facial directions. The contact is preferably carried out by pressing the center part of the bonding face and slowly expanding the pressing area toward the circumference to prevent the residue of bubbles on the bonded interface. Contact of the faces is vacuum is also effective. The quartz pieces bonded with each other by the above process are slowly heated and slowly cooled to normal temperature to attain stronger bond.</p> |
