| 摘要 |
PURPOSE:To obtain an inspecting device made compact for a linear body end face, by combining surface measurement by an interference fringe and observation of surface condition by a microscopic function in the same apparatus. CONSTITUTION:When measuring ruggedness and a curved state of an end face of a linear body 7, a shield plate 6a of a shielding device 6 is lifted and laser light is directed onto an optical path A from a light source 1. The laser light reaches a half mirror 4 after passing through parallel plates 2 and 3 for moving optical path concurrently serving as dimmer filter, and the transmission light and reflected light are reflected on a reference reflection plate 5 and on an end face 7a and meet each other with a half mirror 4 to be combined; consequently, an interference light passes through an objective lens 9 and an imaging lens 10 to form an image on a CCD camera 11. Then, a microscope is so arranged that laser light, while light or red light is selected as desired for the light source 1 and irradiated with the shield plate 6a sticking out. The light beam is reflected on a half mirror and then on the end face 7a to develop an image of the end face on the CCD camera 11 after passing through the objective lens 9 and the imaging lens 10.
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