| 摘要 |
<p>PURPOSE:To decrease manufacturing cost as well as to prevent deterioration of a heating part caused by oxidation by enclosing both ends opening parts as well as covering the outer surface of the heating parts of a tubular silicon carbide heating unit with a silicon carbide coating by the CVD method. CONSTITUTION:A tubular silicon carbide heating unit 10 is formed with a heating part 1 in the middle part, low resistant parts 2 in both sides of the part 1, and terminal parts 3 in both ends. A silicon carbide coat 1b by the CVD method is formed on the outer surface of a silicon carbide base body 1a of the part 1, and parts 3 of an inner hole 5 are enclosed by heat fusing of an aluminum plug-type body 4. Forming coat 1b causes the part 1 to be heated to a deposition temperature region of the CVD reaction, the CVD reaction to be made with a reaction gas supplied, and silicon carbide to be deposited on the base body surface. And resistance of the end part can be further decreased by enclosing both end parts. This prevents oxidation deterioration of the heating part and decreases a manufacturing cost.</p> |
