| 摘要 |
PURPOSE:To control the total output energy of a laser within a set accuracy with the preset value as a center by obtaining the difference of target values of the total output energy, determining the energy sum of laser pulses between the times from the end of one laser pulse to the operation of a light increasing/ decreasing unit, and controlling the output energy by the unit. CONSTITUTION:The difference between the target values E1 of the total output energy of a laser 2 radiated from a laser oscillator and preset total output energy is obtained, and laser total output energy from the end of one laser pulse is detected. Then, the sum of the energy of the laser pulses of l=m+n where m is the number of the laser pulses during the time until a light increasing/decreasing unit 9 provided on the optical path of the laser 2 is operated in response to its detection signal, n is the number of the laser pulses simultaneously controlled of preset integer number of one or more is determined. Then, the output energy is controlled by the unit 9 at each n pieces of laser pulses from when the obtained difference becomes at least the energy sum of the laser pulses determined at the latest to when the difference falls within a desired set accuracy. |
