发明名称 |
Rotatable shear plate interferometer |
摘要 |
A rotatable shear plate interferometer comprises a transparent shear plate mounted obliquely in a tubular supporting member at 45 DEG with respect to its horizontal center axis. This tubular supporting member is supported rotatably around its center axis and a collimated laser beam is made incident on the shear plate along this center axis such that defocus in different directions can be easily measured.
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申请公布号 |
US4786175(A) |
申请公布日期 |
1988.11.22 |
申请号 |
US19860911605 |
申请日期 |
1986.09.26 |
申请人 |
THE UNITED STATES OF AMERICA AS REPRESENTED BY THE UNITED STATES DEPARTMENT OF ENERGY |
发明人 |
DUFFUS, RICHARD C. |
分类号 |
G01M11/00;G01J9/02;G01M11/02;(IPC1-7):G01B9/02 |
主分类号 |
G01M11/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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