发明名称 Rotatable shear plate interferometer
摘要 A rotatable shear plate interferometer comprises a transparent shear plate mounted obliquely in a tubular supporting member at 45 DEG with respect to its horizontal center axis. This tubular supporting member is supported rotatably around its center axis and a collimated laser beam is made incident on the shear plate along this center axis such that defocus in different directions can be easily measured.
申请公布号 US4786175(A) 申请公布日期 1988.11.22
申请号 US19860911605 申请日期 1986.09.26
申请人 THE UNITED STATES OF AMERICA AS REPRESENTED BY THE UNITED STATES DEPARTMENT OF ENERGY 发明人 DUFFUS, RICHARD C.
分类号 G01M11/00;G01J9/02;G01M11/02;(IPC1-7):G01B9/02 主分类号 G01M11/00
代理机构 代理人
主权项
地址