| 摘要 |
PURPOSE:To enable direct observation of the convection state of a molten liquid of a semiconductor, by adding particles to a molten semiconductor, radiating white X-ray or gamma-ray to the molten semiconductor from one side and projecting the moving image of the particle on a fluorescent plate placed at the opposite side of the molten semiconductor. CONSTITUTION:A core made of a metal (e.g. Mo) having larger specific gravity than a molten semiconductor to be observed and infusible at the temperature of the molten semiconductor is covered with a clad made of an inorganic material (e.g. BN) having smaller specific gravity than the molten liquid and inert to the molten liquid. The above process gives a particle having an overall specific gravity same as or slightly larger than that of the molten liquid and easily movable by the convection of the molten liquid. The outer diameter of the particle is preferably <=5mm. White X-ray or gamma-ray is radiated to the molten liquid from one side, the image or the particle moving together with the molten liquid is projected on a fluorescent plate placed at the opposite side of the liquid and the convection state of the molten liquid is observed by the motion of the particle.
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