摘要 |
PURPOSE:To reduce the cost of a ceramic actuator and to improve the mass productivity thereof by integrally forming a thin plate for bonding a piezoelectric element, an outer frame for supporting it, and an inner frame for mounting a movable element on the inner periphery of the thin plate with conductive resin to eliminate the position displacement of the thin metal plate. CONSTITUTION:A ring-like thin plate 11a, an inner frame 11b for mounting the movable element of its inner periphery, and an outer frame 11c for supporting the plate 11a and the frame 11b become an integral molding 11 with conductive resin. Ringlike piezoelectric elements 12, 12a are bonded in parallel on the front and rear faces of the plate 11a by equalizing the polarity, and electric signal input leads 13, 13a are secured by soldering to the elements 12, 12a. Thus, the plate is not displaced at the positions of the components to stabilize its characteristics. Further, an earth side electric input can be directly input from the outer frame to easily delete the leads, and the handling and electrical input are easily conducted.
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